[15a-K507-1~8] 7.2 Applications and technologies of electron beams

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[15a-K507-3] Edge effect correction for Electron Beam Size Estimation in Scanning Electron Microscopy

〇Yasunari Sohda¹, Daichi Tokura¹, Yuki Soshi¹ (1.Univ. of Tsukuba)

Keywords:

scanning electron microscope,beam size,edge effect

One of the fundamental properties of scanning electron microscopes is the electron beam size. Here, we will use image sharpness (DR value) as a substitute for electron beam size, and propose a method to estimate the electron beam size from the DR value. The secondary electron profile of the pattern edge used to obtain the DR value includes the effect of edge effects. The electron beam size is estimated by correcting the profile using the edge effects predicted by electron scattering simulation.