[15a-K507-1~8] 7.2 Applications and technologies of electron beams

10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[15a-K507-6] Secondary electron detectors for low vacuum SEM (comparison of UVD and ET detectors)

〇Yuanzhao Yao¹, Ryosuke Sonoda¹, Yasunari Sohda¹, Takashi Sekiguchi¹ (1.Tsukuba Univ.)

Keywords:

secondary electron,low vacuum,Scanning Electron Microscope