[15p-K206-1~12] Shaping the Future of Green Fabs: Toward Sustainable Manufacturing

3:30 PM - 4:10 PM JST(6:30 AM - 7:10 AM UTC)

[15p-K206-6] Toward a Circular Society: The Challenge of PFAS Recycling

〇Kohei Kiyohara¹, Jun Shibukawa¹ (1.SCREEN Semiconductor Solutions)

Keywords:

semiconductor manufacturing equipment,PFAS,recycling

SCREEN is a global maker with semiconductor manufacturing equipment. We have incorporated sustainability strategies into our mid-term management plan and are actively engaged in activities. One of these activities is to reduce environmental impact by recycling products and parts. In this presentation, we will introduce PFAS, which has been the focus of attention in recent years, trends in regulations surrounding PFAS in various countries, examples of PFAS parts used in semiconductor manufacturing equipment, and our current efforts regarding the recycling of PFAS parts.