[15p-K301-1~12] 17.3 Layered materials

5:45 PM - 6:00 PM JST(8:45 AM - 9:00 AM UTC)

[15p-K301-8] Characterization of thermal stability of Te-based contact electrical properties for TMDC MOSFETs

〇WENHSIN CHANG¹, S. HATAYAMA¹, Y. SAITO^1,2, N. OKADA¹, T. ENDO³, Y. MIYATA³, T. IRISAWA¹ (1.SFRC, AIST, 2.Tohoku Univ., 3.Tokyo Metro. Univ.)

Keywords:

TMDC,MOSFET,thermal stability