[15p-K304-1~11] 3.7 Optical measurement, instrumentation, and sensor

6:30 PM - 6:45 PM JST(9:30 AM - 9:45 AM UTC)

[15p-K304-10] Observation of nano-steps by pupil-segmented polarization imaging camera with ECB LCD

〇Norimasa Tsutsui^1,2, Keisuke Yoshiki¹, Ikenoue Hiroshi¹ (1.D-Future, Research Institute, Kochi Univ. of Tech., 2.Denken Co., Ltd)

Keywords:

Polarization by Split Pupil Technology (PSPT),Nanostructural Surface Measurement,Liquid Crystal Device

This study presents a novel method for detecting nanoscale surface height variations using a pupil-segmented polarization camera integrated with an ECB (Electrically Controlled Birefringence) LCD component. By replacing the conventional spatial polarization converter with this low-cost system, controllable birefringence distributions are achieved across the lens aperture. This allows for electronic adjustment of polarization patterns, enabling selective extraction of step information in multiple orientations without mechanical adjustments. By modifying each segment electronically, the system facilitates rapid switching between global orientation analyses and targeted directional observations, enabling flexible inspection of various surfaces. The optical configuration retains a consistent imaging path, ensuring data quality without requiring complex interferometric setups. This method provides a fast, reconfigurable, and cost-efficient solution for surface profiling across applications such as semiconductors and industrial materials, offering enhanced precision, speed, and adaptability for surface metrology and quality evaluation.