[15p-P12-1~40] 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" (Poster)

[15p-P12-22] Mist CVD of a-TiO_x films on Cu(Al) and its application for anode-free LIB devises

〇So Toyoshima¹, Tomomasa Sato^1,2, Hajime Shirai^2,3, Nobuyuki Matsuki^1,2, Hirotaka Sone³, Hideki Kurihara⁴, Komei Yamamoto⁵, Tomonori Ohno⁵ (1.Kanagawa Univ., 2.Kanagawa Univ. RIE, 3.Saitama Univ., 4.SAITEC, 5.AMAYA CO.,LTD)

Keywords:

LIB,Mist CVD,Oxides

Amorphous TiOx(a-TiOx) anodes synthesized by the mist CVD method were deposited on copper and aluminum substrates, in order to realize an anode-free all-solid-state Li-ion battery, and their charge-discharge characteristics were evaluated. As a result, the Coulombic efficiency on the Cu substrate deteriorated to 94-96% due to charge-discharge cycles. On the other hand, the Al substrate showed approximately 100% stability after 50 charge-discharge cycles. In this study, we report the effects of Cu and Al substrates on the TiOx/Cu(Al) interface based on the analysis results of the microstructure and Li diffusion.