[15p-P12-1~40] 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" (Poster)

[15p-P12-4] Analysis of Crystal Defects Corresponding to Arrowhead-type Etch Pits in β-Ga₂O₃ (001) Epitaxial Wafers

〇Tomomichi Terada¹, Noriyuki Hasuike¹, Toshiyuki Isshiki¹, Kenji Kobayashi², Takeshi Fujitani², Yukari Ishikawa³, Yongzhao Yao^3,4 (1.Kyoto Inst. Tech., 2.Hitachi High-Tech, 3.Japan Fine Ceramics Center, 4.Mie Univ.)

Keywords:

Gallium Oxide,crystal defect,etch pit