Presentation Information
[16a-K101-4]Coating precursor / catalyst solutions for MoS2 CVD growth on Si substrate
〇Ryunosuke Nishimura1, Kentaro Watanabe1,2 (1.Shinshu Univ., 2.Shinshu Univ. IFES)
Keywords:
MoS2,CVD,Selective Growth
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