The 72nd JSAP Spring Meeting 2025
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Presentation Information

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16a-K101-5]Low-particle-flux sputtering of thin MoS2 film at low temperature

〇Shinya Imai1, Iriya Muneta1, Kuniyuki Kakushima1, Tetsuya Tatsumi1, Shigetaka Tomiya1, Hitoshi Wakabayashi1 (1.Institute of Science Tokyo)

Keywords:

Molybudenim disulfide,sputtering

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