[16a-K103-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[16a-K103-6] Observation of Lamb waves propagating in a single crystal AlN free-standing film deposited by selective growth

〇Takashi Kimura¹, Noriyuki Shimoji¹, Kenji Goda¹, Yurina Amamoto¹, Takashi Naiki¹, Koji Terumoto¹, Yoshiaki Oku¹ (1.ROHM Co., Ltd)

Keywords:

Piezoelectric MEMS,Acoustic wage resonator,AlN

We are developing acoustic wave resonators that meet the requirements for higher frequencies for next-generation communication systems. Experiments were conducted to prepare a resonator prototype with a self-supporting structure of a single crystal AlN thin film grown by the MOCVD method in the active region of an oxide mask on a Si substrate, and to demonstrate high-frequency resonance due to the propagation of Lamb waves in this device. The AlN thickness dependence and wavelength dependence of the resonant frequency about the prototype device was evaluated, and it was shown that the obtained signal has the same properties as the Lamb wage.