[16a-K301-1~13] 13.7 Compound and power devices, process technology and characterization

12:15 PM - 12:30 PM JST(3:15 AM - 3:30 AM UTC)

[16a-K301-13] [The 2nd Kenji Natori Award Speech] Study of 4H-SiC pixel sensors for radiation-resistant image sensor

〇Masayuki Tsutsumi¹, Tatsuya Meguro¹, Akinori Takeyama², Takeshi Ohshima², Yasunori Tanaka³, Shin-Ichiro Kuroki¹ (1.RIND,Hiroshima Univ., 2.QST, 3.AIST)

Keywords:

image sensor,SiC