[16a-K403-1~6] 6.2 Carbon-based thin films

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16a-K403-1] Steering of Cathode Spot in High-Rate Filtered Arc Deposition for DLC film

〇Genki Sano¹, Haru Sano¹, Seiya Watanabe¹, Mirano Oneda¹, Hirofumi Takikawa¹, Hiroaki Sugita², Takahiro Hattori², Hiroki Gima² (1.Toyohashi Univ. Technol., 2.OSG Co., Ltd.)

Keywords:

Vacuum arc deposition,Diamond-Like Carbon

Carbon cathodes have a slower driving speed than metal cathodes, and magnetic oscillation is difficult. The driving position of the cathode spot is considered to be near the point where the vertical magnetic flux density Bz is zero on the cathode surface. In this study, we investigated the magnetic field configuration that enables driving of the cathode spot in a linear filter-type arc deposition system (HR-FAD: type carbon) equipped with a coil anode. As a result, driving of the cathode spot was confirmed with an appropriate magnetic field configuration, suggesting the possibility of realizing efficient and stable cathode use.