Presentation Information
[16a-K403-5]Effect of Si addition on DLC film deposited by using HiPIMS
〇Takayuki Ohta1, Yuki Miwa1, Akinori Oda2, Toru Harigai3, Hiroyuki Kousaka3 (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)
Keywords:
high power impulse magnetron sputtering,diamond-like carbon
Comment
To browse or post comments, you must log in.Log in