Presentation Information

[16a-K403-5]Effect of Si addition on DLC film deposited by using HiPIMS

〇Takayuki Ohta1, Yuki Miwa1, Akinori Oda2, Toru Harigai3, Hiroyuki Kousaka3 (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)

Keywords:

high power impulse magnetron sputtering,diamond-like carbon


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