[16a-K403-1~6] 6.2 Carbon-based thin films

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[16a-K403-5] Effect of Si addition on DLC film deposited by using HiPIMS

〇Takayuki Ohta¹, Yuki Miwa¹, Akinori Oda², Toru Harigai³, Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)

Keywords:

high power impulse magnetron sputtering,diamond-like carbon