[16a-Y1311-1~9] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[16a-Y1311-1] Precise dielectric constant analysis of IGZO by using IGZO MOS capacitors

〇Toya Murashima¹, Xuanhedong Gao¹, Mitsuru Takenaka¹, Shinichi Takagi¹, Kasidit Toprasertpong¹ (1.Tokyo Univ.)

Keywords:

dielectric constant