[16a-Y1311-1~9] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[16a-Y1311-9] Influence of Nitrogen Doping and Oxygen Annealing on ZnO Films

〇Yumika Yamada^1,2, Haruki Ohmori², Shuhei Funaki², Yasuji Yamada² (1.Kobelco Res. Inst. Inc., 2.Shimane Univ.)

Keywords:

ZnO,Sputtering deposition,Transparent conducting film