[16p-K202-1~12] Atomic Layer Process (ALP) analysis and application technologies

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)

[16p-K202-11] Evaluation of initial nucleation of Co-ALD using CCTBA

〇Naoki Tamaoki¹, Yubin Deng¹, Jun Yamaguchi¹, Noboru Sato¹, Atsuhiro Tsukune¹, Yukihiro Shimogaki¹ (1.Univ. Tokyo)

Keywords:

area selective ALD,initial nucleation