[16p-K202-1~12] Atomic Layer Process (ALP) analysis and application technologies

5:00 PM - 5:15 PM JST(8:00 AM - 8:15 AM UTC)English Presentation

[16p-K202-12] Study of Pd activation effect on the Co-ALD process

〇(P)Yubin DENG¹, Jun Yamaguchi¹, Yuhei Otaka¹, Naoki Tamaoki¹, Atsuhiro Tsukune¹, Yukihiro Shimogaki¹ (1.The Univ. of Tokyo)

Keywords:

Pd activation,Nucleation,ALD