[16p-K202-1~12] Atomic Layer Process (ALP) analysis and application technologies

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)English Presentation

[16p-K202-7] Adsorption state study of Trimethylaluminum using neural network potential

〇Yuxuan Wu¹, Jun Yamaguchi¹, Noboru Sato¹, Atsuhiro Tsukune¹, Yukihiro Shimogaki¹ (1.The University of Tokyo)

Keywords:

Atomic layer deposition,Density Function Theory,Trimethylaluinum