[16p-K203-1~10] Novel functional oxide materials, devices, techniques for next generation transistor channel application

3:05 PM - 3:20 PM JST(6:05 AM - 6:20 AM UTC)

[16p-K203-5] Design of Resistive Switching Functionality on Phase Change Oxide Thin Films on Hexagonal Born Nitride using Local Nano-Structures

〇(M2)Yuki Tomita¹, Haobo Li¹, Azusa Hattori¹, Shu Nakaharai³, Yutaka Wakayama⁴, Kenji Watanabe⁴, Takashi Taniguchi⁴, Hidekazu Tanaka^1,2 (1.SANKEN, 2.OTRI, 3.Tokyo Univ. of Tech., 4.NIMS)

Keywords:

Phase change oxide thin films,Hexagonal Born Nitride