Presentation Information

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16p-K401-12]Investigation of ultra-high-speed growth conditions of GaN in high Ga₂O region by OVPE

〇Daisuke Yamada¹, Usami Shigeyosi¹, Higasiyama Rituko¹, Imanisi Masayuki¹, Maruyama Mihoko¹, Takino junichi², Sumi Tomoaki², Okayama Yoshio², Yoshimura Masashi³, Hata Masahiko⁴, Isemura Msahiko⁵, Mori Yusuke¹ (1.Grad.Sch. of Eng., Osaka Univ, 2.Panasonic Holdings Corporation, 3.ILE, Osaka Univ, 4.Itocyu Plastics Inc, 5.Sosho-Ohshin Inc)

Keywords:

OVPE,GaN,ultra-high-speed growth

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Presentation Information

[16p-K401-12]Investigation of ultra-high-speed growth conditions of GaN in high Ga2O region by OVPE

Keywords:

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[16p-K401-12]Investigation of ultra-high-speed growth conditions of GaN in high Ga₂O region by OVPE