Presentation Information

[16p-K401-9]Luminescent properties of Si-doped homoepitaxial AlN grown by HVPE

〇Shigefusa Chichibu1, Kiyoshi Kikuchi1, Baxter Moody2, Seiji Mita2, Ramon Collazo3, Zlatko Sitar2,3, Yoshinao Kumagai4, Shoji Ishibashi5, Akira Uedono6, Kohei Shima1 (1.Tohoku Univ., 2.Adroit Materials, Inc., 3.North Carolina State University, 4.Tokyo Univ. Agri. & Tech., 5.AIST, 6.Univ. of Tsukuba)

Keywords:

Nitride semiconductor,AlN,Cathodoluminescence

Optical properties of Si-doped AlN grown by halide vapor phase epitaxy will be shown to underline the importance of vacancy-type defects forming midgap recombination centers.

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