[16p-P01-1~9] 8.1 Plasma production and diagnostics

[16p-P01-4] Study on diagnostic method of gas density distribution using discharge and optical emission delay time measurement in deep oscillation magnetron sputtering

〇Eisuke Yokoyama¹, Yuki Nakagawa¹, Hiroki Kobayashi¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Masahide Tona², Hiroaki Yamamoto², Keizo Tsukamoto², Kiyokazu Fuke³, Keijiro Ohshimo⁴, Fuminori Misaizu⁴ (1.Tokyo Polytech. Univ., 2.Ayabo Corp., 3.Kobe Univ., 4.Tohoku Univ.)

Keywords:

deep oscillation magnetron sputtering,optical emission spectroscopy,gas rarefaction phenomenon

Deep oscillation magnetron sputtering (DOMS), which consists of a very short on/off power pulse train of a few microseconds, has both a high deposition rate and arc-free characteristics. The discharge characteristics of DOMS depend on the combination of micropulse on/off times. In this study, control pulses for DOMS were designed with various combinations of on/off times. The discharge current and voltage characteristics, and the optical emission spectroscopy of the generated plasma were analyzed based on the delay time, which were evaluated by the time difference between the discharge current and the optical emission in response to the applied voltage, The delay time demonstrated a relationship with the operating pressure. The working pressure characteristics of the delay time agree with the curve calculated by Paschen's law. This result indicates a certain correlation between the working pressure and the delay time, and suggests the possibility that the gas pressure distribution can be diagnosed by the delay time analysis.