[16p-P01-1~9] 8.1 Plasma production and diagnostics

[16p-P01-5] Simultaneous multi-component detected energy distribution measurement using time-of-flight mass spectrometer in the deposition region of deep oscillation magnetron sputtering.

〇Hiroki Kobayashi¹, Yuki Nakagawa¹, Eisuke Yokoyama¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Masahide Tona², Hiroaki Yamamoto², Keizo Tsukamoto², Kiyokazu Fuke³, Keijiro Ohshimo⁴, Fuminori Misaizu⁴ (1.Tokyo Polytech Univ., 2.Ayabo Corp., 3.Kobe Univ., 4.Tohoku Univ.)

Keywords:

Time-of-flight mass spectrometer,Magnetron supperring

Recently, deep oscillation magnetron sputtering (DOMS) using comb-shaped power waveforms has attracted attention as the next generation of modulated pulsed power magnetron sputtering (MPPMS) with excellent arcing suppression performance despite high power and long-pulse power input. Currently, DOMS research is concentrating on deposition characteristics, and detailed investigation of the DOMS plasma process is forthcoming. In this study, we developed a simultaneous multi-component ion measurement system for ions of DOMS measured by time-of-flight mass spectrometry (TOF-MS) to get information on the time evolution process and energy characteristics of DOMS. Time evolution measurement and ion energy distribution measurement were performed to multi-component ion particles. In the energy distribution measurement around the ion-intensity peak to fourth pulse discharge, the low-energy components below 10 eV were observed only for Ar⁺ and Ti⁺. On the other hand, high-energy components above 10 eV were observed for all ion species, although the ion intensities were weak. In the present study, we will discuss on the formation processes of ion particles produced in DOMS plasmas, based on the results of the time evolution and the ion energy distribution measurements in DOMS.