[16p-P01-1~9] 8.1 Plasma production and diagnostics

[16p-P01-7] Improvement of resolution in inter-electrode direction in plasma spatial profile reconstruction

〇Ryota Izumi¹, Haruka Suzuki^1,2, Hirotaka Toyoda^1,2,3 (1.Nagoya Univ., 2.cLPS Nagoya Univ., 3.NIFS)

Keywords:

plasma,3D reconstruction

Recently, further improvement of in-plane uniformity of process plasma is required to improve yield in semiconductor manufacturing. We believe that the introduction of plasma structure monitoring is important, and have developed a method to reconstruct 3D spatial distribution based on tomography technique as a method to evaluate the spatial structure of plasma emission by non-contact measurement. In this study, we report our attempt to obtain more detailed luminescence distribution between electrodes.