Presentation Information
[16p-P02-2]Analysis of hydrocarbon dissociation process in CXHY+Ar plasma using quadrupole mass spectrometry
〇Shinjiro Ono1, Manato Eri1, Takamasa Okumura1, Kunihiro Kamataki1, Kazunori Koga1, Masaharu Shiratani1 (1.Kyushu Univ.)
Keywords:
plasma CVD,quadrupole mass spectrometry,cumene
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