[16p-Y1311-1~15] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16p-Y1311-11] Effect of slow cooling on rs-MgZnO thin films grown on sapphire substrates

〇Kosuke Kimura¹, Kohei Shima², Kouichi Matsuo³, Kouji Uchida³, Atsushi Oono³, Shigefusa Chichibu², Kentaro Kaneko⁴ (1.Ritsumeikan Univ., 2.IMRAM-Tohoku Univ., 3.IWASAKI ELECTRIC Co., Ltd., 4.RISA)

Keywords:

rs-MgZnO,DUV,mist-CVD