[17a-K103-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[17a-K103-11] Crystalization of InSb Films Deposited by RF Suputtering on Polyimide using RTA

〇Tatsushi Higa¹, Shota Oku¹, Takashi Noguchi¹, Takashi Kajiwara², Taizoh Sadoh², Tatsuya Okada¹ (1.Univ. Ryukyus, 2.Kyushu Univ.)

Keywords:

InSb(indium antimonide),Poly Imide,Crystalization