[17a-K103-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[17a-K103-5] CMOS inverter using DG poly-Si vertical TFTs on glass substrates

〇Kosei Suzuki¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)

Keywords:

thin film transistor,poly-Si,vertical TFT