[17a-K301-1~10] 13.7 Compound and power devices, process technology and characterization

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[17a-K301-8] Analysis of fixed charge densities in the trench of vertical GaN trench MOSFETs

〇Tohru Oka^1,2 (1.IMaSS Nagoya Univ., 2.Toyoda Gosei)

Keywords:

GaN,trench MOSFET,fixed charge