[17a-K304-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

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[17a-K304-4] Study of forming Zinc Oxide films treated by plasma CVD process for improving the UV resistance of Polycarbonate resin

〇HIROHARU KOJIMA¹ (1.Hiroshima Pref. Tech. Res. Inst.)

Keywords:

Zinc Oxide,Polycarbonate,ultraviolet durability

Polycarbonate resin is used in various optical components and vehicle window materials because it is transparent and has excellent mechanical strength. However, since it is inferior in terms of abrasion resistance and ultraviolet (UV) durability, it is a problem when using it as a glass substitute outdoors. In this study, we report on the fabrication of zinc oxide film with UV absorption characteristics by plasma CVD method, the evaluation of optical properties and film quality, and the study of wear resistance.