[17a-K304-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[17a-K304-9] A Cyclic Etching of Platinum Thin Films by An Oxygen Plasma and A Formic Acid Vapor Treatment

〇Kazuhiro Miwa¹, T.T. Nga Nguyen¹, Daijiro Akagi², Takeshi Tomizawa², Masaru Hori¹, Kenji Ishikawa¹ (1.Nagoya Univ., 2.AGC Inc.)

Keywords:

Cyclic Etching,Noble Metals,platinum