[17a-K401-1~11] 15.4 III-V-group nitride crystals

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[17a-K401-10] Ohmic contacts to sputter-grown heavily Ge-doped GaN

〇(M1)Kohei Okabe¹, Aiko Naito¹, Kohei Ueno¹, Hiroshi Fujioka¹ (1.IIS)

Keywords:

doping,gallium nitride,contact resistance