[17a-K401-1~11] 15.4 III-V-group nitride crystals

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[17a-K401-4] Characteristics of annealed ScAlN/AlGaN /GaN heterostructures

〇Tomoya Okuda¹, Ota Syunsuke², Kubota Kouei³, Takuya Maeda^3,4, Kawahara Takahiko⁵, Makiyama Kozo⁵, Nakata Ken⁵, Kobayashi Atsushi^1,2 (1.Tokyo Univ. of Science, 2.Tokyo Univ. of Science graduate school, 3.The Univ. of Tokyo, 4.The Univ. of Tokyo graduate school, 5.Sumitomo Electric Industries)

Keywords:

ScAlN,GaN