[17a-K401-1~11] 15.4 III-V-group nitride crystals

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-K401-5] Low-temperature epitaxial growth of ScAlN films on AlGaN/GaN structures

〇Shunsuke Ota¹, Tomoya Okuda², Kouei Kubota³, Takuya Maeda^3,4, Takahiko Kawahara⁵, Kozo Makiyama⁵, Ken Nakata⁵, Atsushi Kobayashi^1,2 (1.Tokyo Univ. of Science, 2.Tokyo Univ. of Science Graduate school, 3.The Univ. of Tokyo, 4.The Univ. of Tokyo Graduate school, 5.Sumitomo Electric Industries)

Keywords:

ScAlN,GaN