[17p-K101-1~12] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[17p-K101-1] Variability Measurements in FDSOI MOSFETs with Dipole-Controlled Threshold Voltage

〇(M2)Sujung Chung¹, Tomoko Mizutani¹, Kiyoshi Takeuchi¹, Takuya Saraya¹, Masaharu Kobayashi¹, Toshiro Hiramoto¹ (1.IIS, Univ. of Tokyo)

Keywords:

semiconductor,characteristic variability,dipole

The effect of dipole on threshold voltage (Vth) variability and on-current variability in FDSOI MOSFETs was investigated. It was found that in Vth control, dipole control can increase Vth without increasing the characteristic variability compared to channel doping.