[17p-K202-1~7] 13.3 Insulator technology

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[17p-K202-6] Investigation of low-temperature oxidation of Ge substrates using sulfuric acid additive

〇Hoshiki Harata¹, Gen Shimizu¹, Yu Hashimoto¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Tokyo Univ. of Agri. and Tech.)

Keywords:

MOSFET