[17p-K202-1~7] 13.3 Insulator technology

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[17p-K202-7] Preparation and evaluation of GeO₂/Ge structure using CVD method.

〇Takumi Suzuki¹, Hiroki Inoue¹, Keita Ishizuka¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Tokyo Univ. Agri. & Tech.)

Keywords:

CVD