[17p-K501-1~9] 6.3 Oxide electronics

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[17p-K501-6] Characterization of TiO₂ thin-film transistors with adsorbed alkali metal

〇Ryo Miyazawa¹, Haruto Suzuki¹, Hibiki Takeda¹, Fumihiko Hirose¹ (1.Yamagata Univ.)

Keywords:

thin-film transistor,atomic layer deposition,alkali metal