[17p-K507-1~6] 7.3 Micro/Nano patterning and fabrication

1:15 PM - 1:30 PM JST(4:15 AM - 4:30 AM UTC)

[17p-K507-2] Cross-linking of halogenated polystyrene by irradiation of soft X-rays and dependence of X-ray energy

〇SEIKO NAKAGAWA¹, MAKI OHARA², AKINORI YOKOYA², NORIKO USAMI³ (1.TIRI, 2.QST, 3.KEK)

Keywords:

Cross-linking,Halogenated polystyrene,Soft X-ray irradiation

Cross-linking yield of halogenated polystyrene by irradiation of soft X-rays was studied at various energy of X-ray. When the energy of X-ray was nearer the edge of halogen atom, the yield of cross-linking became larger and was saturated at lower dose.