The 72nd JSAP Spring Meeting 2025
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Session Details

Oral presentation7 Beam Technology and Nanofabrication : 7.3 Micro/Nano patterning and fabrication

[17p-K507-1~6]7.3 Micro/Nano patterning and fabrication

Mon. Mar 17, 2025 1:00 PM - 2:45 PM JST
Mon. Mar 17, 2025 4:00 AM - 5:45 AM UTC
K507 (Lecture Hall Bldg.)
Jiro Yamamoto(Hitachi), Jun Taniguchi(Tokyo Univ. of Sci.)
1:00 PM - 1:15 PM JST(4:00 AM - 4:15 AM UTC)

[17p-K507-1]Applicability of Scan Projection Lithography Using a Gradient-Index Lens Array to Thick Resist Patterning

〇Toshiyuki Horiuchi1, Naoyuki Otsuka1, Takeharu Fukuhara1, Hiroshi Kobayashi1 (1.Tokyo Denki Univ.)
Comment()
1:15 PM - 1:30 PM JST(4:15 AM - 4:30 AM UTC)

[17p-K507-2]Cross-linking of halogenated polystyrene by irradiation of soft X-rays and dependence of X-ray energy

〇SEIKO NAKAGAWA1, MAKI OHARA2, AKINORI YOKOYA2, NORIKO USAMI3 (1.TIRI, 2.QST, 3.KEK)
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1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)English Presentation

[17p-K507-3]Characterization of Electron Beam Lithography-based Direct Patterning of PEDOT:PSS on Si, SOI, and SiO2Substrates

〇(D)Yandong Yang1, Shin'ichi Warisawa1, Reo Kometani1 (1.Univ. of Tokyo)
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2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[17p-K507-4]Improvement of residual layer etching in nanoimprint process

〇Hiroaki Kawata1, Kota Yamasaki1, Kai Funato1, Tetsuya Matsuyama1 (1.Osaka Metro. Univ.)
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2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[17p-K507-5]Study of imprinting behavior during Laser-assisted direct glass imprinting (LADGI)

〇(D)Takehiro Mitsuda1,2, Keisuke Nagato1, Masayuki Nakao1 (1.Tokyo Univ., 2.AGC Inc.)
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2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[17p-K507-6]Fabrication of Curved Mirror for Co-Packged-Optics formed by Nanoimprint method

〇Maaya Watanabe1, Chisyu Mori1, Fumi Nakamura2, Taro Itatani2, Joji Maeda1, Takeru Amano2 (1.Tokyo Univ. of Science, 2.AIST)
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