[17p-K507-1~6] 7.3 Micro/Nano patterning and fabrication

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[17p-K507-6] Fabrication of Curved Mirror for Co-Packged-Optics formed by Nanoimprint method

〇Maaya Watanabe¹, Chisyu Mori¹, Fumi Nakamura², Taro Itatani², Joji Maeda¹, Takeru Amano² (1.Tokyo Univ. of Science, 2.AIST)

Keywords:

Co-Packaged Optics

With the rapid development of artificial intelligence, cloud/edge computing speeds are increasing, and Co-Packaged Optics is required to enable high-bandwidth, low-power semiconductor implementation. Currently, the implementation of the optical input/output parts is an issue in Co-Packaged Optics. We have previously proposed and demonstrated an optical rewiring structure using a three-dimensional mirror. In this study, we used optical nanoimprint technology to prototype a three-dimensional curved mirror for optical rewiring.