The 87th JSAP Autumn Meeting 2026

13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Oral presentation

[10a-E218-1~11]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Sep 10, 2026 9:00 AM - 12:00 PM JST
Thu. Sep 10, 2026 12:00 AM - 3:00 AM UTC

E218 (First Year Education Bld. E Block)

Chair : Reo Kometani(Univ. of Tokyo)

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Oral presentation

[10p-E218-1~13]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Sep 10, 2026 1:30 PM - 5:00 PM JST
Thu. Sep 10, 2026 4:30 AM - 8:00 AM UTC

E218 (First Year Education Bld. E Block)

Chair : Tatsuya Okada(Univ. of the Ryukyus)

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Poster presentation

[11a-PA2-1~4]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Sep 11, 2026 9:00 AM - 10:30 AM JST
Fri. Sep 11, 2026 12:00 AM - 1:30 AM UTC

PA2 (1st Gymnasium)

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Oral presentation

[11p-N304-1~11]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Sep 11, 2026 1:30 PM - 4:30 PM JST
Fri. Sep 11, 2026 4:30 AM - 7:30 AM UTC

N304 (First Year Education Bld. N Block)

Chair : TOPRASERTPONG Kasidit(Univ. of Tokyo), Yan Wu(Sience Tokyo)

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