Symposium (Oral)[15a-70A_101-1~7]Atomic Layer Process (ALP) analysis and application technologies (3)Sun. Mar 15, 2026 9:00 AM - 12:20 PM JSTSun. Mar 15, 2026 12:00 AM - 3:20 AM UTC70A_101 (70th Anniversary Auditorium)
Symposium (Oral)[15p-70A_101-1~13]Atomic Layer Process (ALP) analysis and application technologies (3)Sun. Mar 15, 2026 1:30 PM - 6:00 PM JSTSun. Mar 15, 2026 4:30 AM - 9:00 AM UTC70A_101 (70th Anniversary Auditorium)