The 73rd JSAP Spring Meeting 2026

8 Plasma Electronics : 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Oral presentation

[17a-M_103-1~13]8.2 Plasma deposition of thin film, plasma etching and surface treatment

Tue. Mar 17, 2026 9:00 AM - 12:30 PM JST
Tue. Mar 17, 2026 12:00 AM - 3:30 AM UTC

M_103 (Main Bldg.)

Chair : Kazuhiro Karahashi(Nagoya Univ.), Taku Iwase(日立製作所)

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Oral presentation

[17p-M_103-1~12]8.2 Plasma deposition of thin film, plasma etching and surface treatment

Tue. Mar 17, 2026 2:00 PM - 5:15 PM JST
Tue. Mar 17, 2026 5:00 AM - 8:15 AM UTC

M_103 (Main Bldg.)

Chair : Akihisa Ogino(Shizuoka Univ.), Shota Nunomura(AIST)

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Poster presentation

[18a-PB4-1~12]8.2 Plasma deposition of thin film, plasma etching and surface treatment

Wed. Mar 18, 2026 11:30 AM - 1:00 PM JST
Wed. Mar 18, 2026 2:30 AM - 4:00 AM UTC

PB4 (Martial Arts Hall (B1F))

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