The 73rd Annual Conference of Japanese Society for Engineering Education
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Presentation Information

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[3C15]Development of a Novel Practical Semiconductor Education Program Utilizing Minimal Fab

○Takeshi Ihara1, Yuuki Johno2, Yusuke Hibino1, Satoshi Takeichi1, Hiroyasu Hamada3, Sadayuki Shimoda4 (1. National Insititute of Technology, Sasebo College, Dpt. Electrical and Electronic Engineering, 2. National Insititute of Technology, Sasebo College, Dpt. Chemical and Biological Engineering, 3. National Insititute of Technology, Sasebo College, Dpt. General Education, 4. National Insititute of Technology, Sasebo College)

Keywords:

Semiconductor Engineering,Hands-on Training,Minimal Fab

佐世保高専では全国で初めて，ミニマルファブを活用した実践的な半導体教育を実施している．ミニマルファブは多品種少量生産が可能な半導体製造装置群であり，クリーンルームを必要としない．本稿ではこれまでに実施した半導体教育の取り組みを紹介する．
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