Presentation Information
[1F03]Effect of atmospheric exposure and re-activation on vacuum characteristics of Ti-Zr-V type non-evaporable getter (NEG) coatings
*Takashi Shiga1,2, Junichiro Kamiya2, Kaoru Wada1, Toru Yanagibashi3 (1. TOKYO ELECTRONICS CO., LTD, 2. Japan Atomic Energy Agency, 3. NAT Corporation)
The NEG coating on the inner wall of the chamber allows the chamber itself to function as a vacuum pump.A build-up test, which is gas accumulation without evacuation by the vacuum pump was performed on the coated chamber.Atmospheric release and activation were repeated up to 22 times, but the pressure reached 96 hours after the start of the build-up test did not exceed 3.0E-7Pa. In this way, the vacuum performance was evaluated by repeating atmospheric release and reactivation.