Presentation Information
[1F06]Evaluation of Spinning Rotor Gauges for Metrological Applications: Different types of SRG and ISO Calibration Methods
*Yoshinori Takei1, Hajime Yoshida1 (1. AIST (National Institute of Advanced Industrial Science and Technology))
With growing demand for vacuum measurements, Spinning Rotor Gauges (SRGs) are gaining attention due to their high precision (0.1 mPa – 1 Pa) and long use as metrology standards. However, their reproducibility - especially after transport - affects international comparison accuracy. This study investigates two key aspects: (1) a performance comparison between MKS and PHI SRGs, which differ in magnetic field strength (45 mT vs. 90 mT); and (2) an evaluation of ISO-defined calibration methods A (simple, single-point) and B (multi-point, user-calculated). Experimental results show both the impact of SRG model differences and how calibration method choice influences measurement outcomes.