Presentation Information
[1P31]Humidity dependence of nanogap electrode structures and their application potential
*Shunta Shimizu1, Hisashi Shima2, Hiroshi Suga1, Yasuhisa Naitoh2 (1. Graduate School of Engineering, Chiba Institute of Technology, 2. National Institute of Advanced Industrial Science and Technology)
In this study, we evaluated the humidity dependence of the electrical properties of Au nanogap electrode structures, which were fabricated using photolithography and shadow evaporation. The fabricated nanogap has approximately 14 nm in gap width. Electrical measurements were performed at room temperature (25 °C), while the relative humidity (RH) was increased from 30 % to 90 % in 10 % increments. The observed current showed an exponential increase when RH rose from 50 % to 90 %, while no significant change was observed from 30 % to 50 %, indicating that a continuous adsorbed water layer formed above 50 % RH. The response and recovery times were approximately 1.9 s and 1.1 s, respectively, demonstrating stable and repeatable behavior. These results show that nanogap electrodes can be highly reproducible humidity sensors despite their extremely simple structure.