Presentation Information
[1P45][Withdraw] Electrical and Reliability Characteristics of CoAl/Co as Interconnect Metal
*Yi-Lung Cheng1 (1. Department of Electrical Engineering, National Chi-Nan University)
In this study, CoAl/Co as the interconnecting conductor has been evaluated by characterizing electrical performance and reliability of Co/CoAl//SiO2/p-Si MIS capacitors. The results indicate that CoAl layer promotes adhesion between Co and SiO2, blocks the migration of Cu ions upon thermal stress and electrical stress, and enhances the reliability characteristic. Therefore, CoAl layer can be good candidate materials as both barrier and liner layer in Co interconnects for advanced integrated circuits.