Presentation Information
[1P46]Pulsed laser deposition of transparent conducting oxide on polymer substrates
Chen Hon Nee2, Guang Liang Ong2, Teck Yong Tou2, Siaw Foon Lee3, *Seong Shan Yap1 (1. Department of Physics, Xiamen University Malaysia, 2. Faculty of Artificial Intelligence & Engineering, Multimedia University, Malaysia, 3. Spanish National Research, Council, Eduardo Torroja Institute for Construction Science, Madrid, Spain)
Transparent conducting oxide such as Indium tin oxide (ITO) and Al-doped ZnO (AZO) possess superior conductivity and transparency in the visible for optoelectronics; and also exhibits epsilon near zero at the near infra-red which has great potential for photonics application. Here we investigated the deposition of ITO and AZO films on polymer substrates (polycarbornate, PMMA, polyimide, PET) as compared to the common glass substrate. Pulsed laser deposition is used as the deposition conditions can be optimized carefully for various applications. Deposition is performed at room temperature in oxygen background. The adatom interaction on the substrate surface gave rise to films with different electrical, physical and optical properties, influenced greatly by the substrate properties. Crystalline AZO films can be obtained on polycarbonate and glass substrates, while ITO films are amorphous on both the glass and polymer substrates.